FUI15 Multiss

               

Consortium

 

The MULTISS project, from the FUI15 call for projects in spring 2013, brings together a consortium composed of two manufacturers (ISP System project leader, and Teem Photonics ), two laboratories (LISV from the UVSQ et LNIO/ICD from the UTT), and an association (Alphanov). It has been labeled by three competitiveness clusters (Aerospace Valley , Minalogic and La route des lasers ).

Scientific Objectives

 

MULTISS's objective is to develop an ultra-competitive product in the field of nano-positioning which includes :

- an electromagnetic displacement table of 10mm stroke with a repeatability of the order of 10 nm, UHV compatible and offering angular and planar straightnesses, respectively better than ± 0.5µrad and ± 30nm; this board is associated with its 24-bit control electronics. This board is instrumented by the interferometric sensor described below.

 

- a miniature interferometer in integrated optics with subnanometric resolution, bandwidth greater than 50kHz and compatible,with a laser source of relative chromatic stability> 10-7.

This set will be competitive with respect to the market research carried out. The state of the art, for its part, indicates that no manufacturer in the world, and a fortiori in France, sells boards offering all of these characteristics.

 

 

Impacts on application fields

 

The two laboratories involved will carry out applications as the project progresses thanks to the intermediate deliverables. This will make it possible to demonstrate the possibilities in many application fields in order to open up new exploratory fields in R&D : applications to be explored in the fields of microelectronics, photonics, biotechnologies, microscopy, lithography, materials and surface metrology, etc.

 

Contact : luc.chassagne@uvsq.fr